Acidic Gas Determination Using Indium Tin Oxide-Based Gas Sensors

Kaiyan Peng; Qiang Li; Mingwei Ma; Na Li; Haoran Sheng; Haoyu Li; Yujie Huang; Feng Yun

doi:10.3390/s24041286

Acidic Gas Determination Using Indium Tin Oxide-Based Gas Sensors

Kaiyan Peng
, Qiang Li
, Mingwei Ma
, Na Li
, Haoran Sheng
, Haoyu Li
, Yujie Huang
, Feng Yun

Faculty of Electronic and Information Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

This work has presented gas sensors based on indium tin oxide (ITO) for the detection of SO₂ and NO₂. The ITO gas-sensing material was deposited by radio frequency (RF) magnetron sputtering. The properties of gas sensing could be improved by increasing the ratio of SnO₂. The response characteristics of the gas sensor for detecting different concentrations of NO₂ and SO₂ were investigated. In the detection of NO₂, the sensitivity was significantly improved by increasing the SnO₂ ratio in ITO by 5%, and the response and recovery time were reduced significantly. However, the sensitivity of the sensor decreased with increasing SO₂ concentration. From X-ray photoelectron spectroscopy (XPS) analysis, the gas-sensitive response mechanisms were different in the atmosphere of NO₂ and SO₂. The NO₂ was adsorbed by ITO via physisorption but the SO₂ had a chemical reaction with the ITO surface. The gas selectivity, temperature dependence, and environmental humidity of ITO-based gas sensors were systematically analyzed. The high detection sensitivity for acidic gas of the prepared sensor presented great potential for acid rain monitoring.

Original language	English
Article number	1286
Journal	Sensors (Switzerland)
Volume	24
Issue number	4
DOIs	https://doi.org/10.3390/s24041286
State	Published - Feb 2024

Keywords

indium tin oxide
mechanism of gas-sensitive detection
NO detection
SO detection

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title = "Acidic Gas Determination Using Indium Tin Oxide-Based Gas Sensors",

abstract = "This work has presented gas sensors based on indium tin oxide (ITO) for the detection of SO2 and NO2. The ITO gas-sensing material was deposited by radio frequency (RF) magnetron sputtering. The properties of gas sensing could be improved by increasing the ratio of SnO2. The response characteristics of the gas sensor for detecting different concentrations of NO2 and SO2 were investigated. In the detection of NO2, the sensitivity was significantly improved by increasing the SnO2 ratio in ITO by 5\%, and the response and recovery time were reduced significantly. However, the sensitivity of the sensor decreased with increasing SO2 concentration. From X-ray photoelectron spectroscopy (XPS) analysis, the gas-sensitive response mechanisms were different in the atmosphere of NO2 and SO2. The NO2 was adsorbed by ITO via physisorption but the SO2 had a chemical reaction with the ITO surface. The gas selectivity, temperature dependence, and environmental humidity of ITO-based gas sensors were systematically analyzed. The high detection sensitivity for acidic gas of the prepared sensor presented great potential for acid rain monitoring.",

keywords = "indium tin oxide, mechanism of gas-sensitive detection, NO detection, SO detection",

author = "Kaiyan Peng and Qiang Li and Mingwei Ma and Na Li and Haoran Sheng and Haoyu Li and Yujie Huang and Feng Yun",

note = "Publisher Copyright: {\textcopyright} 2024 by the authors.",

year = "2024",

month = feb,

doi = "10.3390/s24041286",

language = "英语",

volume = "24",

journal = "Sensors (Switzerland)",

issn = "1424-8220",

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TY - JOUR

T1 - Acidic Gas Determination Using Indium Tin Oxide-Based Gas Sensors

AU - Peng, Kaiyan

AU - Li, Qiang

AU - Ma, Mingwei

AU - Li, Na

AU - Sheng, Haoran

AU - Li, Haoyu

AU - Huang, Yujie

AU - Yun, Feng

PY - 2024/2

Y1 - 2024/2

N2 - This work has presented gas sensors based on indium tin oxide (ITO) for the detection of SO2 and NO2. The ITO gas-sensing material was deposited by radio frequency (RF) magnetron sputtering. The properties of gas sensing could be improved by increasing the ratio of SnO2. The response characteristics of the gas sensor for detecting different concentrations of NO2 and SO2 were investigated. In the detection of NO2, the sensitivity was significantly improved by increasing the SnO2 ratio in ITO by 5%, and the response and recovery time were reduced significantly. However, the sensitivity of the sensor decreased with increasing SO2 concentration. From X-ray photoelectron spectroscopy (XPS) analysis, the gas-sensitive response mechanisms were different in the atmosphere of NO2 and SO2. The NO2 was adsorbed by ITO via physisorption but the SO2 had a chemical reaction with the ITO surface. The gas selectivity, temperature dependence, and environmental humidity of ITO-based gas sensors were systematically analyzed. The high detection sensitivity for acidic gas of the prepared sensor presented great potential for acid rain monitoring.

AB - This work has presented gas sensors based on indium tin oxide (ITO) for the detection of SO2 and NO2. The ITO gas-sensing material was deposited by radio frequency (RF) magnetron sputtering. The properties of gas sensing could be improved by increasing the ratio of SnO2. The response characteristics of the gas sensor for detecting different concentrations of NO2 and SO2 were investigated. In the detection of NO2, the sensitivity was significantly improved by increasing the SnO2 ratio in ITO by 5%, and the response and recovery time were reduced significantly. However, the sensitivity of the sensor decreased with increasing SO2 concentration. From X-ray photoelectron spectroscopy (XPS) analysis, the gas-sensitive response mechanisms were different in the atmosphere of NO2 and SO2. The NO2 was adsorbed by ITO via physisorption but the SO2 had a chemical reaction with the ITO surface. The gas selectivity, temperature dependence, and environmental humidity of ITO-based gas sensors were systematically analyzed. The high detection sensitivity for acidic gas of the prepared sensor presented great potential for acid rain monitoring.

KW - indium tin oxide

KW - mechanism of gas-sensitive detection

KW - NO detection

KW - SO detection

UR - https://www.scopus.com/pages/publications/85185560864

U2 - 10.3390/s24041286

DO - 10.3390/s24041286

M3 - 文章

C2 - 38400444

AN - SCOPUS:85185560864

SN - 1424-8220

VL - 24

JO - Sensors (Switzerland)

JF - Sensors (Switzerland)

IS - 4

M1 - 1286

ER -

Acidic Gas Determination Using Indium Tin Oxide-Based Gas Sensors

Abstract

Keywords

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