Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

Zhongliang Yu; Yulong Zhao; Lili Li; Cun Li; Guanwu Zhou; Bian Tian

doi:10.1109/NEMS.2014.6908787

Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

Zhongliang Yu
, Yulong Zhao
, Lili Li
, Cun Li
, Guanwu Zhou
, Bian Tian

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity and a proper overload resistance. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on ANSYS loop calculation results. Structure dimensions are optimized and determined by MATLAB. Silicon bulk micromachining technology is utilized to fabricate the sensor prototype, and the processing is discussed. The outputs under both static and dynamic conditions are tested. Experimental results demonstrate the sensor features a relatively high sensitivity of 11.655 μV/V/Pa in the operating range of 500 Pa at room temperature and a proper overload resistance of 200 times overpressure to promise its survival under atmosphere. The favorable performances enable the sensor's application in measuring absolute micro pressure.

Original language	English
Title of host publication	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	186-190
Number of pages	5
ISBN (Electronic)	9781479947270
DOIs	https://doi.org/10.1109/NEMS.2014.6908787
State	Published - 23 Sep 2014
Event	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States Duration: 13 Apr 2014 → 16 Apr 2014

Publication series

Name	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Conference

Conference	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Country/Territory	United States
City	Waikiki Beach
Period	13/04/14 → 16/04/14

Keywords

MEMS
Piezoresistive
high-overload
high-sensitive
micro-pressure

Access to Document

10.1109/NEMS.2014.6908787

Cite this

Yu, Z., Zhao, Y., Li, L., Li, C., Zhou, G., & Tian, B. (2014). Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 (pp. 186-190). Article 6908787 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2014.6908787

Yu, Zhongliang ; Zhao, Yulong ; Li, Lili et al. / Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 186-190 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

@inproceedings{b435e5a14468497083f159c04cb9917c,

title = "Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure",

abstract = "The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity and a proper overload resistance. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on ANSYS loop calculation results. Structure dimensions are optimized and determined by MATLAB. Silicon bulk micromachining technology is utilized to fabricate the sensor prototype, and the processing is discussed. The outputs under both static and dynamic conditions are tested. Experimental results demonstrate the sensor features a relatively high sensitivity of 11.655 μV/V/Pa in the operating range of 500 Pa at room temperature and a proper overload resistance of 200 times overpressure to promise its survival under atmosphere. The favorable performances enable the sensor's application in measuring absolute micro pressure.",

keywords = "MEMS, Piezoresistive, high-overload, high-sensitive, micro-pressure",

author = "Zhongliang Yu and Yulong Zhao and Lili Li and Cun Li and Guanwu Zhou and Bian Tian",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 ; Conference date: 13-04-2014 Through 16-04-2014",

year = "2014",

month = sep,

day = "23",

doi = "10.1109/NEMS.2014.6908787",

language = "英语",

series = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014",

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Yu, Z, Zhao, Y, Li, L, Li, C, Zhou, G & Tian, B 2014, Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. in 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014., 6908787, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Institute of Electrical and Electronics Engineers Inc., pp. 186-190, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Waikiki Beach, United States, 13/04/14. https://doi.org/10.1109/NEMS.2014.6908787

Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. / Yu, Zhongliang; Zhao, Yulong; Li, Lili et al.
9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 186-190 6908787 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

AU - Yu, Zhongliang

AU - Zhao, Yulong

AU - Li, Lili

AU - Li, Cun

AU - Zhou, Guanwu

AU - Tian, Bian

PY - 2014/9/23

Y1 - 2014/9/23

N2 - The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity and a proper overload resistance. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on ANSYS loop calculation results. Structure dimensions are optimized and determined by MATLAB. Silicon bulk micromachining technology is utilized to fabricate the sensor prototype, and the processing is discussed. The outputs under both static and dynamic conditions are tested. Experimental results demonstrate the sensor features a relatively high sensitivity of 11.655 μV/V/Pa in the operating range of 500 Pa at room temperature and a proper overload resistance of 200 times overpressure to promise its survival under atmosphere. The favorable performances enable the sensor's application in measuring absolute micro pressure.

AB - The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity and a proper overload resistance. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on ANSYS loop calculation results. Structure dimensions are optimized and determined by MATLAB. Silicon bulk micromachining technology is utilized to fabricate the sensor prototype, and the processing is discussed. The outputs under both static and dynamic conditions are tested. Experimental results demonstrate the sensor features a relatively high sensitivity of 11.655 μV/V/Pa in the operating range of 500 Pa at room temperature and a proper overload resistance of 200 times overpressure to promise its survival under atmosphere. The favorable performances enable the sensor's application in measuring absolute micro pressure.

KW - MEMS

KW - Piezoresistive

KW - high-overload

KW - high-sensitive

KW - micro-pressure

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DO - 10.1109/NEMS.2014.6908787

M3 - 会议稿件

AN - SCOPUS:84908608760

T3 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

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BT - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Y2 - 13 April 2014 through 16 April 2014

ER -

Yu Z, Zhao Y, Li L, Li C, Zhou G, Tian B. Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 186-190. 6908787. (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014). doi: 10.1109/NEMS.2014.6908787

Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

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Keywords

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