Abstract
This paper reports a prototype for a standard connector between a microfluidic chip and the macro world. This prototype is the first to demonstrate a fully functioning socket for a microchip to access the outside world by means of fluids, data and energy supply, as well as providing process visibility. It has 20 channels for the input and output of liquids or gases, as well as compressed air or vacuum lines for pneumatic power lines. It also contains 42 pins for electrical signals and power. All these connections were designed in a planar configuration with linear orthogonal arrays. The vertical space was opened for optical measurement and evaluation. The die (29.1 mm × 27.5 mm × 0.9 mm) can be easily mounted and dismounted from the socket. No adhesives or solders are used at any contact points. The pressure limit for the connection of working fluids was 0.2 MPa and the current limit for the electrical connections was 1 A. This socket supports both serial and parallel processing applications. It exhibits great potential for developing microfluidic system efficiently.
| Original language | English |
|---|---|
| Pages (from-to) | 98-104 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4936 |
| DOIs | |
| State | Published - 2002 |
| Externally published | Yes |
| Event | Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Melbourne, VIC., Australia Duration: 16 Dec 2002 → 18 Dec 2002 |
Keywords
- MEMS
- Microfluidic packaging
- World-to-chip socket
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