A wake-up switch using a piezoelectric differential pressure sensor

Yutaka Tomimatsu; Hidetoshi Takahashi; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor

Yutaka Tomimatsu
, Hidetoshi Takahashi
, Takeshi Kobayashi
, Kiyoshi Matsumoto
, Isao Shimoyama
, Toshihiro Itoh
, Ryutaro Maeda

NMEMS Technology Research Organization
The University of Tokyo
National Institute of Advanced Industrial Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O₃(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

Original language	English
Title of host publication	Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing
Subtitle of host publication	Sensing the Future, ISSNIP 2013
Pages	23-26
Number of pages	4
DOIs	https://doi.org/10.1109/ISSNIP.2013.6529757
State	Published - 2013
Externally published	Yes
Event	2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 - Melbourne, VIC, Australia Duration: 2 Apr 2013 → 5 Apr 2013

Publication series

Name	Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
Volume	1

Conference

Conference	2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
Country/Territory	Australia
City	Melbourne, VIC
Period	2/04/13 → 5/04/13

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10.1109/ISSNIP.2013.6529757

Cite this

Tomimatsu, Y., Takahashi, H., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). A wake-up switch using a piezoelectric differential pressure sensor. In Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 (pp. 23-26). Article 6529757 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013; Vol. 1). https://doi.org/10.1109/ISSNIP.2013.6529757

Tomimatsu, Yutaka ; Takahashi, Hidetoshi ; Kobayashi, Takeshi et al. / A wake-up switch using a piezoelectric differential pressure sensor. Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. pp. 23-26 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013).

@inproceedings{5f7c7b380f2f4fd787138a9d14921b9f,

title = "A wake-up switch using a piezoelectric differential pressure sensor",

abstract = "This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.",

author = "Yutaka Tomimatsu and Hidetoshi Takahashi and Takeshi Kobayashi and Kiyoshi Matsumoto and Isao Shimoyama and Toshihiro Itoh and Ryutaro Maeda",

year = "2013",

doi = "10.1109/ISSNIP.2013.6529757",

language = "英语",

isbn = "9781467355001",

series = "Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013",

pages = "23--26",

booktitle = "Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing",

note = "2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 ; Conference date: 02-04-2013 Through 05-04-2013",

}

Tomimatsu, Y, Takahashi, H, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, A wake-up switch using a piezoelectric differential pressure sensor. in Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013., 6529757, Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013, vol. 1, pp. 23-26, 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013, Melbourne, VIC, Australia, 2/04/13. https://doi.org/10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi et al.
Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. p. 23-26 6529757 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A wake-up switch using a piezoelectric differential pressure sensor

AU - Tomimatsu, Yutaka

AU - Takahashi, Hidetoshi

AU - Kobayashi, Takeshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2013

Y1 - 2013

N2 - This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

AB - This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

UR - https://www.scopus.com/pages/publications/84881085308

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DO - 10.1109/ISSNIP.2013.6529757

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AN - SCOPUS:84881085308

SN - 9781467355001

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SP - 23

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BT - Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing

T2 - 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013

Y2 - 2 April 2013 through 5 April 2013

ER -

Tomimatsu Y, Takahashi H, Kobayashi T, Matsumoto K, Shimoyama I, Itoh T et al. A wake-up switch using a piezoelectric differential pressure sensor. In Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. p. 23-26. 6529757. (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013). doi: 10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor

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