A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter

Xiaopeng Zhang; Xueyong Wei; Yang Gao; Minghui Zhao; Yonghong Qi; Libo Zhao; Zhuangde Jiang

doi:10.1109/NEMS51815.2021.9451277

A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter

Xiaopeng Zhang
, Xueyong Wei
, Yang Gao
, Minghui Zhao
, Yonghong Qi
, Libo Zhao
, Zhuangde Jiang

School of Instrument Science and Technology

Northwest Institute of Nuclear Technology
Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

For the requirements of high sensitivity and long-term stability of a MEMS gravimeter. This paper presents a tunable quasi-zero stiffness mechanism by a complementary quasi-zero stiffness structure of the pre-shaped bistable beam and conventional folded springs. The V-beam actuators are used to drive a voltage controlled bulking compression for stiffness compensation. The system is theoretically modeled by Galerkin method based on the first buckling mode, and the behavior of nonlinear spring is discussed. The performance result shows that the value and interval of the negative stiffness are determined by the as-fabricated height-to-width and height-to-length ratios, and actively tuned by the effective axial load. The behavior of this mechanism shows a promising potential of realizing a highly stable gravimeter.

Original language	English
Title of host publication	Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1157-1160
Number of pages	4
ISBN (Electronic)	9781665419413
DOIs	https://doi.org/10.1109/NEMS51815.2021.9451277
State	Published - 25 Apr 2021
Event	16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021 - Xiamen, China Duration: 25 Apr 2021 → 29 Apr 2021

Publication series

Name	Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021

Conference

Conference	16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
Country/Territory	China
City	Xiamen
Period	25/04/21 → 29/04/21

Access to Document

10.1109/NEMS51815.2021.9451277

Cite this

Zhang, X., Wei, X., Gao, Y., Zhao, M., Qi, Y., Zhao, L., & Jiang, Z. (2021). A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter. In Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021 (pp. 1157-1160). Article 9451277 (Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS51815.2021.9451277

Zhang, Xiaopeng ; Wei, Xueyong ; Gao, Yang et al. / A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter. Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 1157-1160 (Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021).

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title = "A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter",

abstract = "For the requirements of high sensitivity and long-term stability of a MEMS gravimeter. This paper presents a tunable quasi-zero stiffness mechanism by a complementary quasi-zero stiffness structure of the pre-shaped bistable beam and conventional folded springs. The V-beam actuators are used to drive a voltage controlled bulking compression for stiffness compensation. The system is theoretically modeled by Galerkin method based on the first buckling mode, and the behavior of nonlinear spring is discussed. The performance result shows that the value and interval of the negative stiffness are determined by the as-fabricated height-to-width and height-to-length ratios, and actively tuned by the effective axial load. The behavior of this mechanism shows a promising potential of realizing a highly stable gravimeter.",

author = "Xiaopeng Zhang and Xueyong Wei and Yang Gao and Minghui Zhao and Yonghong Qi and Libo Zhao and Zhuangde Jiang",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021 ; Conference date: 25-04-2021 Through 29-04-2021",

year = "2021",

month = apr,

day = "25",

doi = "10.1109/NEMS51815.2021.9451277",

language = "英语",

series = "Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021",

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Zhang, X, Wei, X, Gao, Y, Zhao, M, Qi, Y, Zhao, L & Jiang, Z 2021, A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter. in Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021., 9451277, Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 1157-1160, 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, 25/04/21. https://doi.org/10.1109/NEMS51815.2021.9451277

A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter. / Zhang, Xiaopeng; Wei, Xueyong; Gao, Yang et al.
Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 1157-1160 9451277 (Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter

AU - Zhang, Xiaopeng

AU - Wei, Xueyong

AU - Gao, Yang

AU - Zhao, Minghui

AU - Qi, Yonghong

AU - Zhao, Libo

AU - Jiang, Zhuangde

PY - 2021/4/25

Y1 - 2021/4/25

N2 - For the requirements of high sensitivity and long-term stability of a MEMS gravimeter. This paper presents a tunable quasi-zero stiffness mechanism by a complementary quasi-zero stiffness structure of the pre-shaped bistable beam and conventional folded springs. The V-beam actuators are used to drive a voltage controlled bulking compression for stiffness compensation. The system is theoretically modeled by Galerkin method based on the first buckling mode, and the behavior of nonlinear spring is discussed. The performance result shows that the value and interval of the negative stiffness are determined by the as-fabricated height-to-width and height-to-length ratios, and actively tuned by the effective axial load. The behavior of this mechanism shows a promising potential of realizing a highly stable gravimeter.

AB - For the requirements of high sensitivity and long-term stability of a MEMS gravimeter. This paper presents a tunable quasi-zero stiffness mechanism by a complementary quasi-zero stiffness structure of the pre-shaped bistable beam and conventional folded springs. The V-beam actuators are used to drive a voltage controlled bulking compression for stiffness compensation. The system is theoretically modeled by Galerkin method based on the first buckling mode, and the behavior of nonlinear spring is discussed. The performance result shows that the value and interval of the negative stiffness are determined by the as-fabricated height-to-width and height-to-length ratios, and actively tuned by the effective axial load. The behavior of this mechanism shows a promising potential of realizing a highly stable gravimeter.

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T3 - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021

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BT - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

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Zhang X, Wei X, Gao Y, Zhao M, Qi Y, Zhao L et al. A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter. In Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 1157-1160. 9451277. (Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021). doi: 10.1109/NEMS51815.2021.9451277

A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter

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