Abstract
A parametric study on shape and cross-sectional area of the thin film produced by Laser Chemical Vapor Deposition (LCVD) with a moving laser beam is presented. The problem is formulated in the coordinate system that moves with the laser beam, and, therefore, the problem is a quasi-steady state. The effects of laser scanning velocity, laser power, and radius of the laser beam on the shapes of the deposited film are investigated. A simulation-based correlation of the cross-sectional area is proposed based on the simulation results.
| Original language | English |
|---|---|
| Pages (from-to) | 796-800 |
| Number of pages | 5 |
| Journal | Journal of Manufacturing Science and Engineering |
| Volume | 126 |
| Issue number | 4 |
| DOIs | |
| State | Published - Nov 2004 |
| Externally published | Yes |
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