Abstract
A quartz resonant pressure sensor for ultra-high pressure measurement has been designed and verified. The pressure conversion unit of the sensor is composed of a pressure cylinder and a flexible lever, which can accurately and efficiently meet the role of converting and passing the ultra-high pressure to the resonant unit. The resonant unit of the sensor uses quartz DETF resonators and forms a differential output structure to meets the requirements of high precision and stability. The theory of the overall sensor design scheme is consistent with the simulation results, which verifies the feasibility of the design scheme. The experimental results show that in the pressure range of 120 Mpa, the sensitivity of the ultra-high pressure sensor is 27.3 Hz/Mpa, the linearity reaches 0.0112%, and the total accuracy is 0.0365%. The sensor can be used for high-precision and high-stability detection of ultra-high pressure, which is necessary in special fields such as deep-sea exploration.
| Original language | English |
|---|---|
| Pages (from-to) | 22553-22561 |
| Number of pages | 9 |
| Journal | IEEE Sensors Journal |
| Volume | 21 |
| Issue number | 20 |
| DOIs | |
| State | Published - 15 Oct 2021 |
Keywords
- DETF
- MEMS
- Pressure sensors
- Quartz resonator
- Ultra-high pressure