TY - GEN
T1 - A polymer mems mirror for on-demand light distribution fabricated by injection molding and transfer of printed layers
AU - Kurihara, Kazuma
AU - Nagumo, Osamu
AU - Takagi, Hideki
AU - Maeda, Ryutaro
PY - 2014
Y1 - 2014
N2 - A high-throughput and low-cost fabrication process for an optical microscanner is proposed for lighting applications. The process utilizes mold replication and transfer of printed functional layers to form a film. We confirmed that a high-throughput fabrication lasting less than 30 s could be obtained by using a mold with a knife edge. A polymer microscanner with feature size of 0.6 × 2 mm2 was successfully fabricated using our process. The scanner was actuated by magnetic forces generated by an external coil, and the mirror tilt angle was successfully measured by a strain gauge formed by the functional layer transfer. By synchronizing the LED input signal and the polymer scanner tilt angle, the illuminance distribution could be controlled. For example, this distribution could be expanded from 10°to 50°or divided into two separated spots. We believe that our developed process can address new MEMS applications such as commercial lighting.
AB - A high-throughput and low-cost fabrication process for an optical microscanner is proposed for lighting applications. The process utilizes mold replication and transfer of printed functional layers to form a film. We confirmed that a high-throughput fabrication lasting less than 30 s could be obtained by using a mold with a knife edge. A polymer microscanner with feature size of 0.6 × 2 mm2 was successfully fabricated using our process. The scanner was actuated by magnetic forces generated by an external coil, and the mirror tilt angle was successfully measured by a strain gauge formed by the functional layer transfer. By synchronizing the LED input signal and the polymer scanner tilt angle, the illuminance distribution could be controlled. For example, this distribution could be expanded from 10°to 50°or divided into two separated spots. We believe that our developed process can address new MEMS applications such as commercial lighting.
UR - https://www.scopus.com/pages/publications/84899018681
U2 - 10.1109/MEMSYS.2014.6765702
DO - 10.1109/MEMSYS.2014.6765702
M3 - 会议稿件
AN - SCOPUS:84899018681
SN - 9781479935086
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 560
EP - 563
BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Y2 - 26 January 2014 through 30 January 2014
ER -