A novel piezoresistive sensitive structure for micromachined high-pressure sensors

Xin Guo; Rahman Hebibul; Zhuangde Jiang; Libo Zhao; Tingzhong Xu; Zhiming Zhao; Zhikang Li; Yu Xu; Wendi Gao

doi:10.1109/NEMS.2017.8017123

A novel piezoresistive sensitive structure for micromachined high-pressure sensors

Xin Guo
, Rahman Hebibul
, Zhuangde Jiang
, Libo Zhao
, Tingzhong Xu
, Zhiming Zhao
, Zhikang Li
, Yu Xu
, Wendi Gao

School of Instrument Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive effect, the performance of the sensitivity and nonlinearity affected by the dimensions of cavity structure had been clarified. The simulation results show the optimized position for the resistance is in lower region. This sensitive structure is suitable for micromachined high-pressure sensors and the performance study set a guideline for designing micromachined high-pressure sensors with multi-cavities working in different range.

Original language	English
Title of host publication	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	728-731
Number of pages	4
ISBN (Electronic)	9781509030590
DOIs	https://doi.org/10.1109/NEMS.2017.8017123
State	Published - 25 Aug 2017
Event	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States Duration: 9 Apr 2017 → 12 Apr 2017

Publication series

Name	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Conference

Conference	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Country/Territory	United States
City	Los Angeles
Period	9/04/17 → 12/04/17

Keywords

3D piezoresistive effect
micromachined high pressure
piezoresistive sensitive structure
resistance arrangement

Access to Document

10.1109/NEMS.2017.8017123

Cite this

Guo, X., Hebibul, R., Jiang, Z., Zhao, L., Xu, T., Zhao, Z., Li, Z., Xu, Y., & Gao, W. (2017). A novel piezoresistive sensitive structure for micromachined high-pressure sensors. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 728-731). Article 8017123 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2017.8017123

Guo, Xin ; Hebibul, Rahman ; Jiang, Zhuangde et al. / A novel piezoresistive sensitive structure for micromachined high-pressure sensors. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 728-731 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

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title = "A novel piezoresistive sensitive structure for micromachined high-pressure sensors",

abstract = "A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive effect, the performance of the sensitivity and nonlinearity affected by the dimensions of cavity structure had been clarified. The simulation results show the optimized position for the resistance is in lower region. This sensitive structure is suitable for micromachined high-pressure sensors and the performance study set a guideline for designing micromachined high-pressure sensors with multi-cavities working in different range.",

keywords = "3D piezoresistive effect, micromachined high pressure, piezoresistive sensitive structure, resistance arrangement",

author = "Xin Guo and Rahman Hebibul and Zhuangde Jiang and Libo Zhao and Tingzhong Xu and Zhiming Zhao and Zhikang Li and Yu Xu and Wendi Gao",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",

year = "2017",

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doi = "10.1109/NEMS.2017.8017123",

language = "英语",

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Guo, X, Hebibul, R, Jiang, Z , Zhao, L, Xu, T, Zhao, Z, Li, Z, Xu, Y & Gao, W 2017, A novel piezoresistive sensitive structure for micromachined high-pressure sensors. in 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017., 8017123, 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Institute of Electrical and Electronics Engineers Inc., pp. 728-731, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, United States, 9/04/17. https://doi.org/10.1109/NEMS.2017.8017123

A novel piezoresistive sensitive structure for micromachined high-pressure sensors. / Guo, Xin; Hebibul, Rahman; Jiang, Zhuangde et al.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 728-731 8017123 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A novel piezoresistive sensitive structure for micromachined high-pressure sensors

AU - Guo, Xin

AU - Hebibul, Rahman

AU - Jiang, Zhuangde

AU - Zhao, Libo

AU - Xu, Tingzhong

AU - Zhao, Zhiming

AU - Li, Zhikang

AU - Xu, Yu

AU - Gao, Wendi

PY - 2017/8/25

Y1 - 2017/8/25

N2 - A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive effect, the performance of the sensitivity and nonlinearity affected by the dimensions of cavity structure had been clarified. The simulation results show the optimized position for the resistance is in lower region. This sensitive structure is suitable for micromachined high-pressure sensors and the performance study set a guideline for designing micromachined high-pressure sensors with multi-cavities working in different range.

AB - A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive effect, the performance of the sensitivity and nonlinearity affected by the dimensions of cavity structure had been clarified. The simulation results show the optimized position for the resistance is in lower region. This sensitive structure is suitable for micromachined high-pressure sensors and the performance study set a guideline for designing micromachined high-pressure sensors with multi-cavities working in different range.

KW - 3D piezoresistive effect

KW - micromachined high pressure

KW - piezoresistive sensitive structure

KW - resistance arrangement

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BT - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Y2 - 9 April 2017 through 12 April 2017

ER -

Guo X, Hebibul R, Jiang Z , Zhao L, Xu T, Zhao Z et al. A novel piezoresistive sensitive structure for micromachined high-pressure sensors. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 728-731. 8017123. (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). doi: 10.1109/NEMS.2017.8017123

A novel piezoresistive sensitive structure for micromachined high-pressure sensors

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