@inproceedings{4a984a0e22834c719719416d0e5f52bc,
title = "A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET)",
abstract = "In this research, we propose a novel MEMS sensor based on Laterally Movable Gate Array Field Effect Transistor (LMGAFET) for the measurement of nN force. By designing an array structure and adopting reasonable parameters and utilizing modified MOS3 model, the sensor's proved to have high sensitivity of 0.107 mA/nN, low cross-Axis sensitivity and excellent linearity. Besides, a modified MOS3 model is presented and utilized to demonstrate operation behavior of the sensor. This sensor with the ability of measuring nN force can be widely used in evaluate biophysical properties measurement of cells or tissues.",
keywords = "FET, MEMS, biophysical properties measurement, force sensor",
author = "Wendi Gao and Libo Zhao and Zhuangde Jiang and Yong Xia and Xin Guo and Zhiming Zhao and Yulong Zhao and Dong Sun",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",
year = "2017",
month = aug,
day = "25",
doi = "10.1109/NEMS.2017.8017122",
language = "英语",
series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "723--727",
booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
}