@inproceedings{b563ba047e35438cb140da3f78257bf6,
title = "A novel MEMS-based lab-on-a-tube technology and its application",
abstract = "In this paper, we present a novel micro lab-on-a-tube technology, which is a combination of three-dimensional (3D) photolithography, nanoimprint and other processes, in order to directly fabricate micro functional structures and devices on tiny capillaries. The new technology is mainly MEMS-based and several sensor prototypes including micro temperature sensor, micro coils and electrochemical electrodes have been successfully prepared on capillaries with the diameter from 300 μm to 1 mm. The minimum feature sizes have been successfully reduced down to 2 μm and smaller. Experimental characterization of the fabricated prototypes revealed that more interesting applications could be expected through integrating new bio and nanomaterials directly into the novel lab-on-a-tube technology.",
keywords = "MEMS, lab chip, nanoimprint, tube",
author = "Yi Zhang and Toshihiro Itoh and Ryutaro Maeda",
note = "Publisher Copyright: {\textcopyright} 2015 The Japan Institute of Electronics Packaging.; 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015 ; Conference date: 14-04-2015 Through 17-04-2015",
year = "2015",
month = may,
day = "20",
doi = "10.1109/ICEP-IAAC.2015.7111137",
language = "英语",
series = "ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "870--873",
booktitle = "ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference",
}