A modified multiscale model for microcantilever sensor

In this paper, an existed model for adsorption-induced surface stress is modified with physical clarity, based on the equilibrium of force. In the proposed multiscale model, a four-atom system is used, instead of the existed three-atom system which did not consider the force equilibrium. By analyzing the force state of an atom, the thickness of the first layer atoms can be determined. Thus, the proposed model does not need to determine the layer-thickness by experiments or artificially. The results obtained from the proposed model agree very well with the experimental data. This paper is helpful to investigate the atomistic theory of the microcantilever sensor.