@inproceedings{b15c35352bc54295b3e32795c5b1e970,
title = "A micromechanical resonant optical power meter",
abstract = "This paper presents a new kind of micromechanical optical power meter using a micro disk resonator. With the change of laser power irradiated on the surface of resonator, the resonant frequency of the micromechanical resonator drifts because of its body temperature change. The simulation result is verified by the experimental data. A linear relationship between the laser power and the resonant frequency is obtained by both open-loop and closed-loop experiments. The minimum detectable optical power is found to be 0.98μW. The response time of the detector is less than 0.3s when the optical power changes.",
keywords = "Micromechanical resonator, Optical power meter, resonant frequency",
author = "Xuan Chen and Dong Pu and Tianyi Zhang and Zhuangde Jiang and Xueyong Wei",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 ; Conference date: 09-07-2017 Through 13-07-2017",
year = "2017",
month = oct,
day = "27",
doi = "10.1109/FCS.2017.8088993",
language = "英语",
series = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "656--659",
booktitle = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings",
}