TY - GEN
T1 - A micro-fabricated scanning force microscope using a 3-dimensional piezoelectric T-shape actuator
AU - Chu, J.
AU - Maeda, R.
AU - Itoh, T.
AU - Kataoka, K.
AU - Suga, T.
N1 - Publisher Copyright:
© 1999 Japan Soc. Of Applied Physics.
PY - 1999
Y1 - 1999
N2 - Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.
AB - Recently, scanning force microscopy (SFM) has gained much attention for its potential in surface lithography and data storage applications, particularly because of its capability for very small bit size. However, there are problems to be overcome before SFM can be used for real practical lithography and data storage, particularly its low throughput. In order to overcome these problems, we need small SFM volumes and simple SFM structures. In this report we propose a micro-fabricated SFM device. We expect it to replace the cantilever, deflection detection unit and the scanner currently being used in traditional SFMs.
UR - https://www.scopus.com/pages/publications/85043777931
U2 - 10.1109/IMNC.1999.797514
DO - 10.1109/IMNC.1999.797514
M3 - 会议稿件
AN - SCOPUS:85043777931
T3 - 1999 International Microprocesses and Nanotechnology Conference
SP - 136
EP - 137
BT - 1999 International Microprocesses and Nanotechnology Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1999 International Microprocesses and Nanotechnology Conference
Y2 - 6 July 1999 through 8 July 1999
ER -