@inproceedings{bcd05fcdcf9b4fa2b4065c3b47cbb6ef,
title = "A MEMS Pirani Vacuum Sensor with a Mesh Support Beam for Extending the Lower Limit of Vacuum Measurement",
abstract = "This paper reports a novel MEMS Pirani sensor with a low thermal conductance mesh support beam for extending the lower limit of vacuum measurements. Experimental results demonstrate that the mesh support beam design reduces the solid thermal conductance of the MEMS Pirani chip by 63.67\%, from 3.35 {\texttimes} 10−5 W/K to 1.22 {\texttimes} 10−5 W/K. Compared to conventional MEMS Pirani sensors, the sensitivity of the sensor employing the low-thermal-conductivity mesh-supported beam design increased from 0.019 V/Pa to 0.17 V/Pa, with an 8.9-fold improvement. And the detection lower limit of the sensor was extended to 5.83 {\texttimes} 10−4 Pa, attributable to the reduced solid thermal conductance of the chip. High sensitivity and ultra-low detection limits enable MEMS Pirani sensors to meet vacuum detection requirements in the semiconductor industry or industrial Internet of Things (IoT) systems.",
keywords = "High Sensitivity, MEMS, Pirani Vacuum Sensor",
author = "Jingping Qiao and Ruiwen Liu and Yanmei Kong and Xu, \{Gao Bo\} and Xin Liu and Yuxin Ye and Xiangbin Du and Zilong Wang and Binbin Jiao",
note = "Publisher Copyright: {\textcopyright} The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2026.; 4th International Conference on Sensing, Measurement, Communication and Internet of Things Technologies, SMC-IoT 2025 ; Conference date: 28-11-2025 Through 30-11-2025",
year = "2026",
doi = "10.1007/978-981-95-8232-7\_44",
language = "英语",
isbn = "9789819582310",
series = "Lecture Notes in Electrical Engineering",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "470--478",
editor = "Zhenyu Zhao and Peiquan Jin and Mingchuan Zhang",
booktitle = "Proceedings of the 4th International Conference on Sensing, Measurement, Communication and Internet of Things Technologies",
}