@inproceedings{be5f6a59d0c947d0ad60b54d50f59dc6,
title = "A MEMS fluid density sensor based on trapezoidal cantilever",
abstract = "A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical- System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.",
keywords = "Density sens, MEMS, Rectangular cantilever, Trapezoidal cantilever",
author = "Libo Zhao and Enze Huang and Guiming Zhang and Yulong Zhao and Xiaopo Wang and Zhuangde Jiang and Zhigang Liu",
year = "2011",
doi = "10.4028/www.scientific.net/KEM.483.374",
language = "英语",
isbn = "9783037851753",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "374--377",
booktitle = "MEMS/NEMS Nano Technology",
}