A MEMS based Fabry–Pérot accelerometer with high resolution

Minghui Zhao; Kangli Jiang; Hongwu Bai; Hairong Wang; Xueyong Wei

doi:10.1007/s00542-020-04747-3

A MEMS based Fabry–Pérot accelerometer with high resolution

Minghui Zhao
, Kangli Jiang
, Hongwu Bai
, Hairong Wang
, Xueyong Wei

School of Instrument Science and Technology

Research output: Contribution to journal › Article › peer-review

49 Scopus citations

Abstract

Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–Pérot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.

Original language	English
Pages (from-to)	1961-1969
Number of pages	9
Journal	Microsystem Technologies
Volume	26
Issue number	6
DOIs	https://doi.org/10.1007/s00542-020-04747-3
State	Published - 1 Jun 2020

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@article{3c3856f7c3c546329bafd1109f7ddc86,

title = "A MEMS based Fabry–P{\'e}rot accelerometer with high resolution",

abstract = "Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–P{\'e}rot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–P{\'e}rot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.",

author = "Minghui Zhao and Kangli Jiang and Hongwu Bai and Hairong Wang and Xueyong Wei",

note = "Publisher Copyright: {\textcopyright} 2020, Springer-Verlag GmbH Germany, part of Springer Nature.",

year = "2020",

month = jun,

day = "1",

doi = "10.1007/s00542-020-04747-3",

language = "英语",

volume = "26",

pages = "1961--1969",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Science and Business Media Deutschland GmbH",

number = "6",

}

TY - JOUR

T1 - A MEMS based Fabry–Pérot accelerometer with high resolution

AU - Zhao, Minghui

AU - Jiang, Kangli

AU - Bai, Hongwu

AU - Wang, Hairong

AU - Wei, Xueyong

PY - 2020/6/1

Y1 - 2020/6/1

N2 - Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–Pérot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.

AB - Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–Pérot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.

UR - https://www.scopus.com/pages/publications/85078029226

U2 - 10.1007/s00542-020-04747-3

DO - 10.1007/s00542-020-04747-3

M3 - 文章

AN - SCOPUS:85078029226

SN - 0946-7076

VL - 26

SP - 1961

EP - 1969

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 6

ER -

A MEMS based Fabry–Pérot accelerometer with high resolution

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