@inproceedings{63f68df6f1c140a997fdd341cd1a4fdf,
title = "A large size MEMS scanning mirror for speckle reduction application",
abstract = "Based on the micro electronic mechanical system (MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented in this paper. Here we fabricated micromirror with the silicon wafer and electroplated soft Ni film on the backside of mirror. The no-coil structural micro-mirror prevented heat produced on the mirror effectively. The scanning resonant frequency for the mirror is 674Hz along slow axis, and 1870Hz along fast axis. Finally, the MEMS mirror was used in laser display system to reduce the laser speckle. With the 2-D scanning of the MEMS mirror, the speckle contrast could be reduced to 4.2\%. We demonstrated that the image quality of a laser display system could be greatly improved with the MEMS mirror.",
keywords = "MEMS, electromagnetic force, optical scanning, speckle reduction",
author = "Fanya Li and Jiahui He and Wenjiang Shen and Peng Zhou and Huijun Yu and Fei Ma",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",
year = "2017",
month = aug,
day = "25",
doi = "10.1109/NEMS.2017.8017080",
language = "英语",
series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "539--543",
booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
}