A High-Precision Three-Dimensional Probe Array Temperature Sensor

Bian Tian; Yifan Xing; Xuefeng Zhang; Zhaojun Liu; Zhongkai Zhang; Jiangjiang Liu; Bingfei Zhang; Qijing Lin; Zhuangde Jiang

doi:10.3390/chemosensors10080309

A High-Precision Three-Dimensional Probe Array Temperature Sensor

Bian Tian
, Yifan Xing
, Xuefeng Zhang
, Zhaojun Liu
, Zhongkai Zhang
, Jiangjiang Liu
, Bingfei Zhang
, Qijing Lin
, Zhuangde Jiang

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technology and the profiling mask was prepared by 3D printing technology. The comprehensive performance of the temperature sensor was improved by systematic optimization of the heat treatment process and accuracy correction algorithm. Results showed that the sensor can measure with an accuracy of up to ±0.19%FS from −60 °C to 200 °C. The three-dimensional probe array temperature sensor shows great advantages in sensitivity, reliability resolution, stability, and measurement accuracy.

Original language	English
Article number	309
Journal	Chemosensors
Volume	10
Issue number	8
DOIs	https://doi.org/10.3390/chemosensors10080309
State	Published - Aug 2022

Keywords

flexible sensor
high-precision
temperature

Access to Document

10.3390/chemosensors10080309

Cite this

@article{19e573ba00b4466a8e526ccf8785248e,

title = "A High-Precision Three-Dimensional Probe Array Temperature Sensor",

abstract = "To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technology and the profiling mask was prepared by 3D printing technology. The comprehensive performance of the temperature sensor was improved by systematic optimization of the heat treatment process and accuracy correction algorithm. Results showed that the sensor can measure with an accuracy of up to ±0.19\%FS from −60 °C to 200 °C. The three-dimensional probe array temperature sensor shows great advantages in sensitivity, reliability resolution, stability, and measurement accuracy.",

keywords = "flexible sensor, high-precision, temperature",

author = "Bian Tian and Yifan Xing and Xuefeng Zhang and Zhaojun Liu and Zhongkai Zhang and Jiangjiang Liu and Bingfei Zhang and Qijing Lin and Zhuangde Jiang",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors.",

year = "2022",

month = aug,

doi = "10.3390/chemosensors10080309",

language = "英语",

volume = "10",

journal = "Chemosensors",

issn = "2227-9040",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "8",

}

TY - JOUR

T1 - A High-Precision Three-Dimensional Probe Array Temperature Sensor

AU - Tian, Bian

AU - Xing, Yifan

AU - Zhang, Xuefeng

AU - Liu, Zhaojun

AU - Zhang, Zhongkai

AU - Liu, Jiangjiang

AU - Zhang, Bingfei

AU - Lin, Qijing

AU - Jiang, Zhuangde

PY - 2022/8

Y1 - 2022/8

N2 - To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technology and the profiling mask was prepared by 3D printing technology. The comprehensive performance of the temperature sensor was improved by systematic optimization of the heat treatment process and accuracy correction algorithm. Results showed that the sensor can measure with an accuracy of up to ±0.19%FS from −60 °C to 200 °C. The three-dimensional probe array temperature sensor shows great advantages in sensitivity, reliability resolution, stability, and measurement accuracy.

AB - To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technology and the profiling mask was prepared by 3D printing technology. The comprehensive performance of the temperature sensor was improved by systematic optimization of the heat treatment process and accuracy correction algorithm. Results showed that the sensor can measure with an accuracy of up to ±0.19%FS from −60 °C to 200 °C. The three-dimensional probe array temperature sensor shows great advantages in sensitivity, reliability resolution, stability, and measurement accuracy.

KW - flexible sensor

KW - high-precision

KW - temperature

UR - https://www.scopus.com/pages/publications/85137383968

U2 - 10.3390/chemosensors10080309

DO - 10.3390/chemosensors10080309

M3 - 文章

AN - SCOPUS:85137383968

SN - 2227-9040

VL - 10

JO - Chemosensors

JF - Chemosensors

IS - 8

M1 - 309

ER -

A High-Precision Three-Dimensional Probe Array Temperature Sensor

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this