A high-integration sensor array sensitive to oxynitride mixture

Measuring the concentration of oxynitride NO_x(including NO and NO₂) can provide a scientific basis for determining its potential harm to the human body. The existing metal oxide semiconductor sensor arrays are greatly limited by high operating temperature and low integration. In this article, we report on a high-integration carbon nanotubes sensor array with two different electrode separations sensitive to oxynitride mixture at low temperature. The triple-electrode sensor array is comprised of a large carbon nanotube array cathode, two extracting electrodes and two collecting electrodes and worked at non-self-sustaining discharge state, which was determined by the study on current-voltage characteristic of a double-electrode structure sensor. Through studying the relationship between gas concentration and discharge current at 1 atm, we obtained the distinct sensitivities of the binary mixture in the concentration ranges of 0–1166 ppm NO and 0–712 ppm NO₂using the sensor array at low operating voltages and 60 °C. Collecting currents of the two sensors in the array decreased with increasing NO and NO₂concentration in the gas mixture. The repeatable characteristics and dynamical response tests of the sensors were also conducted. The proposed sensor array has potential for the direct detection of a NO-NO₂mixture without separating the mixed gases.