TY - GEN
T1 - A High-Dynamic and Ultra-Low Pressure Sensor with a Novel Beam-Island-Membrane Structure
AU - Gao, Yi
AU - Yang, Juan
AU - Li, Wei
AU - Gao, Yushan
AU - Zhao, Libo
AU - Han, Xiangguang
AU - Han, Feng
AU - Huang, Mimi
AU - Tan, Renjie
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - This paper presents a high-performance ultralow pressure sensor with a novel piezoresistive beam-islandmembrane structure to enhance the sensor's sensitivity and the natural frequency. The structure comprises a membrane, a beam, and several groups of islands. The sensor's sensitivity is efficiently increased by hollowing out the beam structure. Meanwhile, the islands are hollow to improve the dynamic performance. The sensor chip size is only 3 mm×3 mm×0.47 mm with a pressure range of 600 Pa, the sensitivity of 0.232 mV/Pa, and the natural frequency of 19.96 kHz. Compared with other reported ultra-low pressure sensors, the sensitivity and dynamic performance have been greatly improved. The proposed sensor provides an excellent candidate for lowpressure measurement fields, such as surgery diagnostic systems, space shuttle high-precision flight controls, and so on.
AB - This paper presents a high-performance ultralow pressure sensor with a novel piezoresistive beam-islandmembrane structure to enhance the sensor's sensitivity and the natural frequency. The structure comprises a membrane, a beam, and several groups of islands. The sensor's sensitivity is efficiently increased by hollowing out the beam structure. Meanwhile, the islands are hollow to improve the dynamic performance. The sensor chip size is only 3 mm×3 mm×0.47 mm with a pressure range of 600 Pa, the sensitivity of 0.232 mV/Pa, and the natural frequency of 19.96 kHz. Compared with other reported ultra-low pressure sensors, the sensitivity and dynamic performance have been greatly improved. The proposed sensor provides an excellent candidate for lowpressure measurement fields, such as surgery diagnostic systems, space shuttle high-precision flight controls, and so on.
KW - high sensitivity
KW - natural frequency
KW - stress concentration
KW - ultra-low pressure sensors
UR - https://www.scopus.com/pages/publications/85203839974
U2 - 10.1109/NEMS60219.2024.10639912
DO - 10.1109/NEMS60219.2024.10639912
M3 - 会议稿件
AN - SCOPUS:85203839974
T3 - 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
BT - 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
Y2 - 2 May 2024 through 5 May 2024
ER -