A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection

Xiangguang Han; Libo Zhao; Xuejiao Li; Ping Yang; Hongyan Wang; Zhuangde Jiang

doi:10.1109/NEMS.2019.8915599

A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection

Xiangguang Han
, Libo Zhao
, Xuejiao Li
, Ping Yang
, Hongyan Wang
, Zhuangde Jiang

Xi'an Jiaotong University
Shaanxi Electric Power Research Institute

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric 'H' beams assembled in one pressure diaphragm to realize symmetric-lateral vibration. When a pressure applied, the Z-direction offset between fixed and movable combs is less than 0.2 μm, which is beneficial for close-loop control. The novel structure combined with piezoresistive detection and coupling beam is presented, which can obtain pure tensile stress or compressive stress on the detection beam with low noise, adjacent modal output will be easy to filter. The simulated sensor non-linearity after polynomial fitting is less than 0.01%FS with the pressure range of 0-300 kPa, and its measuring sensitivity is up to-25 Hz/kPa.

Original language	English
Title of host publication	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	167-171
Number of pages	5
ISBN (Electronic)	9781728116297
DOIs	https://doi.org/10.1109/NEMS.2019.8915599
State	Published - Apr 2019
Event	14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 - Bangkok, Thailand Duration: 11 Apr 2019 → 14 Apr 2019

Publication series

Name	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

Conference

Conference	14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Country/Territory	Thailand
City	Bangkok
Period	11/04/19 → 14/04/19

Keywords

high accuracy
integrated comb
lateral driven
piezoresistive detection
resonant pressure sensor

Access to Document

10.1109/NEMS.2019.8915599

Cite this

Han, X., Zhao, L., Li, X., Yang, P., Wang, H., & Jiang, Z. (2019). A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection. In Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 (pp. 167-171). Article 8915599 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2019.8915599

Han, Xiangguang ; Zhao, Libo ; Li, Xuejiao et al. / A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection. Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 167-171 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019).

@inproceedings{15bb82fc6f7143a9a0079f39650da5e6,

title = "A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection",

abstract = "A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric 'H' beams assembled in one pressure diaphragm to realize symmetric-lateral vibration. When a pressure applied, the Z-direction offset between fixed and movable combs is less than 0.2 μm, which is beneficial for close-loop control. The novel structure combined with piezoresistive detection and coupling beam is presented, which can obtain pure tensile stress or compressive stress on the detection beam with low noise, adjacent modal output will be easy to filter. The simulated sensor non-linearity after polynomial fitting is less than 0.01\%FS with the pressure range of 0-300 kPa, and its measuring sensitivity is up to-25 Hz/kPa.",

keywords = "high accuracy, integrated comb, lateral driven, piezoresistive detection, resonant pressure sensor",

author = "Xiangguang Han and Libo Zhao and Xuejiao Li and Ping Yang and Hongyan Wang and Zhuangde Jiang",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 ; Conference date: 11-04-2019 Through 14-04-2019",

year = "2019",

month = apr,

doi = "10.1109/NEMS.2019.8915599",

language = "英语",

series = "Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "167--171",

booktitle = "Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019",

}

Han, X, Zhao, L, Li, X, Yang, P, Wang, H & Jiang, Z 2019, A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection. in Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019., 8915599, Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Institute of Electrical and Electronics Engineers Inc., pp. 167-171, 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, 11/04/19. https://doi.org/10.1109/NEMS.2019.8915599

A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection. / Han, Xiangguang; Zhao, Libo; Li, Xuejiao et al.
Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 167-171 8915599 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection

AU - Han, Xiangguang

AU - Zhao, Libo

AU - Li, Xuejiao

AU - Yang, Ping

AU - Wang, Hongyan

AU - Jiang, Zhuangde

PY - 2019/4

Y1 - 2019/4

N2 - A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric 'H' beams assembled in one pressure diaphragm to realize symmetric-lateral vibration. When a pressure applied, the Z-direction offset between fixed and movable combs is less than 0.2 μm, which is beneficial for close-loop control. The novel structure combined with piezoresistive detection and coupling beam is presented, which can obtain pure tensile stress or compressive stress on the detection beam with low noise, adjacent modal output will be easy to filter. The simulated sensor non-linearity after polynomial fitting is less than 0.01%FS with the pressure range of 0-300 kPa, and its measuring sensitivity is up to-25 Hz/kPa.

AB - A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric 'H' beams assembled in one pressure diaphragm to realize symmetric-lateral vibration. When a pressure applied, the Z-direction offset between fixed and movable combs is less than 0.2 μm, which is beneficial for close-loop control. The novel structure combined with piezoresistive detection and coupling beam is presented, which can obtain pure tensile stress or compressive stress on the detection beam with low noise, adjacent modal output will be easy to filter. The simulated sensor non-linearity after polynomial fitting is less than 0.01%FS with the pressure range of 0-300 kPa, and its measuring sensitivity is up to-25 Hz/kPa.

KW - high accuracy

KW - integrated comb

KW - lateral driven

KW - piezoresistive detection

KW - resonant pressure sensor

UR - https://www.scopus.com/pages/publications/85076672195

U2 - 10.1109/NEMS.2019.8915599

DO - 10.1109/NEMS.2019.8915599

M3 - 会议稿件

AN - SCOPUS:85076672195

T3 - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

SP - 167

EP - 171

BT - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

Y2 - 11 April 2019 through 14 April 2019

ER -

Han X, Zhao L, Li X, Yang P, Wang H, Jiang Z. A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection. In Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 167-171. 8915599. (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019). doi: 10.1109/NEMS.2019.8915599

A High accuracy resonant pressure sensor with lateral driven and piezoresistive detection

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this