A composite structure pressure sensor based on quartz DETF resonator

Ziming Ren; Yonghong Qi; Minghui Zhao; Bin Li; Weixuan Jing; Xueyong Wei

doi:10.1016/j.sna.2022.113883

A composite structure pressure sensor based on quartz DETF resonator

Ziming Ren
, Yonghong Qi
, Minghui Zhao
, Bin Li
, Weixuan Jing
, Xueyong Wei

School of Instrument Science and Technology

Xi'an Jiaotong University
Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0–240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa.

Original language	English
Article number	113883
Journal	Sensors and Actuators A: Physical
Volume	346
DOIs	https://doi.org/10.1016/j.sna.2022.113883
State	Published - 16 Oct 2022

Keywords

High precision
Performance calibration
Quartz resonator
Resonant pressure sensors

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10.1016/j.sna.2022.113883

Cite this

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title = "A composite structure pressure sensor based on quartz DETF resonator",

abstract = "Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0{\textendash}240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83\% FS, a hysteresis of 0.79\% FS, and a repeatability of 0.76\% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa.",

keywords = "High precision, Performance calibration, Quartz resonator, Resonant pressure sensors",

author = "Ziming Ren and Yonghong Qi and Minghui Zhao and Bin Li and Weixuan Jing and Xueyong Wei",

note = "Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",

year = "2022",

month = oct,

day = "16",

doi = "10.1016/j.sna.2022.113883",

language = "英语",

volume = "346",

journal = "Sensors and Actuators A: Physical",

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TY - JOUR

T1 - A composite structure pressure sensor based on quartz DETF resonator

AU - Ren, Ziming

AU - Qi, Yonghong

AU - Zhao, Minghui

AU - Li, Bin

AU - Jing, Weixuan

AU - Wei, Xueyong

PY - 2022/10/16

Y1 - 2022/10/16

N2 - Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0–240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa.

AB - Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0–240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa.

KW - High precision

KW - Performance calibration

KW - Quartz resonator

KW - Resonant pressure sensors

UR - https://www.scopus.com/pages/publications/85138457428

U2 - 10.1016/j.sna.2022.113883

DO - 10.1016/j.sna.2022.113883

M3 - 文章

AN - SCOPUS:85138457428

SN - 0924-4247

VL - 346

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

M1 - 113883

ER -

A composite structure pressure sensor based on quartz DETF resonator

Abstract

Keywords

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