@inproceedings{2aa3b58652314d97965dd0de067bfb98,
title = "3D microcoil fabricated on the capillary surface by cylindrical projection lithography for NMR application",
abstract = "In the present work, a 3D gold microcoil has been directly fabricated on a capillary surface based on MEMS technology utilizing our new developed cylindrical projection lithography system. Compared with other hand winding, laser exposure and contact printing 3D microcoils, the one our reported can realize higher fabrication resolution and efficiency. As a result, this microcoil would greatly improve sensitivity of nuclear magnetic resonance (NMR) used in detecting mass-limited samples.",
keywords = "3D microcoil, Cylindrical projection lithography, MEMS, NMR",
author = "Zhuoqing Yang and Shogo Uchiyama and Yi Zhang and Masaori Hayasei and Toshihiro Itoh and Ryutaro Maeda",
year = "2012",
language = "英语",
isbn = "9780979806452",
series = "Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012",
publisher = "Chemical and Biological Microsystems Society",
pages = "647--649",
booktitle = "Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012",
note = "16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 ; Conference date: 28-10-2012 Through 01-11-2012",
}