2D micro scanner actuated by sol-gel derived double layered PZT

Jiunnjye Tsaur; Lulu Zhang; Ryutaro Maeda; S. Matsumoto

2D micro scanner actuated by sol-gel derived double layered PZT

Jiunnjye Tsaur
, Lulu Zhang
, Ryutaro Maeda
, S. Matsumoto

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to conference › Paper › peer-review

17 Scopus citations

Abstract

2D micro scanners actuated by sol-gel derived double layered PZT actuators were designed and fabricated. In our previous work, the better scanning capability of double layered PZT structures has been investigated [8]. The purpose of this paper is to determine 1D and 2D scanning characteristics of 2D micro scanners with respect to resonant actuations. While resonating with 7.5 V at 3750 Hz and 5350 Hz, the scanning angle of 26±2 degrees and 24±2 degrees were obtained. Furthermore, the new fabrication process greatly improved the residual stress of suspended structures due to the compensation effect of double layered PZT. Wet etching process for PZT not only amended the uniformity, but also increased the device yield economically.

Original language	English
Pages	548-551
Number of pages	4
State	Published - 2002
Externally published	Yes
Event	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 20 Jan 2002 → 24 Jan 2002

Conference

Conference	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
Country/Territory	United States
City	Las Vegas, NV
Period	20/01/02 → 24/01/02

Cite this

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title = "2D micro scanner actuated by sol-gel derived double layered PZT",

abstract = "2D micro scanners actuated by sol-gel derived double layered PZT actuators were designed and fabricated. In our previous work, the better scanning capability of double layered PZT structures has been investigated [8]. The purpose of this paper is to determine 1D and 2D scanning characteristics of 2D micro scanners with respect to resonant actuations. While resonating with 7.5 V at 3750 Hz and 5350 Hz, the scanning angle of 26±2 degrees and 24±2 degrees were obtained. Furthermore, the new fabrication process greatly improved the residual stress of suspended structures due to the compensation effect of double layered PZT. Wet etching process for PZT not only amended the uniformity, but also increased the device yield economically.",

author = "Jiunnjye Tsaur and Lulu Zhang and Ryutaro Maeda and S. Matsumoto",

year = "2002",

language = "英语",

pages = "548--551",

note = "15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

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TY - CONF

T1 - 2D micro scanner actuated by sol-gel derived double layered PZT

AU - Tsaur, Jiunnjye

AU - Zhang, Lulu

AU - Maeda, Ryutaro

AU - Matsumoto, S.

PY - 2002

Y1 - 2002

N2 - 2D micro scanners actuated by sol-gel derived double layered PZT actuators were designed and fabricated. In our previous work, the better scanning capability of double layered PZT structures has been investigated [8]. The purpose of this paper is to determine 1D and 2D scanning characteristics of 2D micro scanners with respect to resonant actuations. While resonating with 7.5 V at 3750 Hz and 5350 Hz, the scanning angle of 26±2 degrees and 24±2 degrees were obtained. Furthermore, the new fabrication process greatly improved the residual stress of suspended structures due to the compensation effect of double layered PZT. Wet etching process for PZT not only amended the uniformity, but also increased the device yield economically.

AB - 2D micro scanners actuated by sol-gel derived double layered PZT actuators were designed and fabricated. In our previous work, the better scanning capability of double layered PZT structures has been investigated [8]. The purpose of this paper is to determine 1D and 2D scanning characteristics of 2D micro scanners with respect to resonant actuations. While resonating with 7.5 V at 3750 Hz and 5350 Hz, the scanning angle of 26±2 degrees and 24±2 degrees were obtained. Furthermore, the new fabrication process greatly improved the residual stress of suspended structures due to the compensation effect of double layered PZT. Wet etching process for PZT not only amended the uniformity, but also increased the device yield economically.

UR - https://www.scopus.com/pages/publications/0036124177

M3 - 论文

AN - SCOPUS:0036124177

SP - 548

EP - 551

T2 - 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002

Y2 - 20 January 2002 through 24 January 2002

ER -

2D micro scanner actuated by sol-gel derived double layered PZT

Abstract

Conference

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