Abstract
Adsorptive separation of NF3 from semiconductor exhaust gases has become an increasingly important topic in industrial applications. By introducing iodine ions into cage-like organic network (CON), quaternized I-CON material was prepared. The DFT calculation revealed that the electric field was formed on the pore surface by introducing iodide ions, which enhanced the inducing force between NF3 molecule and I-CON framework. Compared with CON, the NF3 adsorption capacity of I-CON increased from 30.49mL/g to 45.13mL/g and the IAST selectivity increased from 10.59—15.49 to 15.01—19.47 according to the single-component gas adsorption results. Moreover, the dynamic adsorption selectivity of I-CON was also higher than that of CON in the breakthrough tests. Thus, separation ability of CON could be effectively improved by ion modification, showing its potential for the real-world NF3 capture and enrichment.
| Translated title of the contribution | Adsorptive separation of NF3 using ion-modified CON material |
|---|---|
| Original language | Chinese (Traditional) |
| Pages (from-to) | 6076-6085 |
| Number of pages | 10 |
| Journal | Huagong Jinzhan/Chemical Industry and Engineering Progress |
| Volume | 42 |
| Issue number | 11 |
| DOIs | |
| State | Published - 20 Nov 2023 |
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