碳化硅陶瓷基复合材料激光刻蚀技术研究进展

Silicon carbide ceramic matrix composite (CMC-SiC) has many advantages, such as low density, high strength, high-temperature resistance, and corrosion resistance. It has application prospects in the field of aerospace. However, CMC-SiC is a kind of difficult-to-machine material, with ultra-high hardness and anisotropy. Conventional processing technologies are unsuitable for the high quality and efficient processing of CMC-SiC. Laser processing with high processing quality, non-contact, low heat input, wide range of application, and easy to combine with numerical control technology to achieve automation, has prospects of becoming the mainstream technology for precision processing of CMC-SiC. We analyze the typical thermally induced defects in laser processing based on the interaction mechanism of CMC-SiC with laser. We describe the advantages of ultrashort pulse laser in the CMC-SiC precision processing. In this context, we spotlight the development trend of laser processing technology for CMC-SiC and provide a theoretical basis and technical reference for the precision manufacturing of new aerospace CMC-SiC components parts.