激光光束多维空间调控加工技术与系统研究进展

The continuous development of industries such as electronics, aerospace, and automotive has driven an increasingly strong demand for high-precision machining of precision equipment components, where structures like precision micro-holes and micro-grooves serve as critical structural units. Traditional methods of directly processing structures using lasers suffer from sidewall taper issues. Even with processing equipment such as two-dimensional and three-dimensional galvanometers, it is difficult to completely eliminate the taper, which greatly restricts the wider application of laser processing. Laser beam multi-dimensional spatial control processing systems, through specific combinations and movements of optical components, endow the laser focus with multi-dimensional degrees of freedom in both position and orientation within space, making them suitable for high-efficiency and high-precision processing scenarios of complex microstructures. This paper systematically reviews the evolutionary trajectory and research status of laser beam multi-dimensional spatial control processing technology. Based on the two major technical schools of transmissive and reflective methods currently achieving multi-dimensional laser control, the technical principles and implementation structures of published processing systems from both schools are systematically introduced. Combined with the latest experimental progress domestic and abroad, the results of practical processing using relevant systems are summarized. Based on the experimental results, the improvement effects of these processing systems on machining quality are comparatively analyzed to discuss the advantages and disadvantages of various domestic and international products, providing references and guidance for the upgrade and industrial application of multi-dimensional laser processing systems.