深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能

Translated title of the contribution: Tribological Properties of CrN/TiN Superlattice Coatings Deposited by Deep Oscillation Magnetron Sputtering
  • Yixiang Ou
  • , Haoqi Wang
  • , Pan Pang
  • , Jun Luo
  • , Lin Chen
  • , Bin Liao
  • , Mingkai Lei
  • , Xiaoping Ouyang

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Tribological properties of CrN/TiN superlattice coatings deposited on IN 718, WC-6%Co and Si(100) by the combined deep oscillation magnetron sputtering were investigated. The results show that the coating growth is independent of the nature of substrate materials. As the hardness of substrate materials is increased, the scratch critical loads increase. Adhesion failure mode changes from buckling failure to cooperative deformation of substrate/coating system with only small cracks in the whole scratch track. Wear mechanism of the coatings deposited on IN 718 and WC-6%Co changes from abrasive and oxidative wear to mild abrasive wear under a normal load of 2 N. Under a normal load of 4 N, the coatings on IN 718 suffer severe oxidative wear, while the coatings on WC-6%Co suffer the combined abrasive and oxidative wear. The production, accumulation and mass transfer of oxides result in the oscillation of friction coefficient during dry sliding wear tests.

Translated title of the contributionTribological Properties of CrN/TiN Superlattice Coatings Deposited by Deep Oscillation Magnetron Sputtering
Original languageChinese (Traditional)
Pages (from-to)2476-2479
Number of pages4
JournalXiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Volume49
Issue number7
StatePublished - 1 Jul 2020
Externally publishedYes

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