微纳制造技术的发展趋势与发展建议

Micro-nano manufacturing technology can achieve high-precision processing at the micro-nano level and is the core technology in the field of modern high-tech manufacturing. Improving the level of micro-nano manufacturing technology will help enhance the overall competitiveness of high-end manufacturing in China and have a positive significance for promoting technological innovation and industrial upgrading. In this paper, the micro-nano manufacturing technology system was introduced, and the development of several typical micro-nano manufacturing technologies such as chip micro-nano manufacturing, laser micro-nano manufacturing, and polymer micro-nano manufacturing was analyzed in detail. In addition, the development trends of multi-scale precision micro-nano processing technology, multifunctional material synthesis and manufacturing, high integration and multifunctionality, self-assembly technology and structure, bio-nanotechnology fusion manufacturing, quantum information and nanodevices, and green and environmentally friendly manufacturing technology were summarized. Targeted development suggestions were put forward, including deepening basic research, innovating materials and processes, strengthening talent training and introduction, and enhancing the integration of industry, academia, and research and technology transformation, so as to promote the overall level and high-quality development of the micro-nano manufacturing in China.