光盘上集成的液体微透镜阵列与可重构超分辨成像

The microlens-assisted microscope realizes super-resolution imaging and observation, and has the advantages of no marking, no damage, real-time, localization, and good environmental compatibility. Liquid microlens arrays with uniformity and easy manipulation can realize super-resolution imaging without complicated mechanical scanning and driving. However, simply and efficiently controlling the imaging distance is a key technical challenge to the realization of super-resolution imaging of microlens. In this paper, the uniform depths of photoresist microholes on light disk are fabricated by ultraviolet exposure technology. Using liquid self-assembly technology, the microholes are filled with glycerol droplets, and thus ensuring the near-field imaging distance of the microlens. The reconfigurable super-resolution of 226-nm-wide grating line and the imaging magnification of 1.59 times are observed under the optical microscope. At present, the theory of super-resolution imaging based on microlens is not unified and perfect. In this paper, the Abbe imaging principle is used to explain the imaging magnification and super-resolution characteristics. Therefore, the liquid microlens arrays integrated on the light disk show great potential application in optical nanometer measurements and sensing devices.