光学相干成像技术在激光加工过程实时监测与控制中的应用研究进展^*

Laser processing technology, including laser welding, additive manufacturing, subtractive manufacturing, and so on, has the advantages of high machining quality, high efficiency, and no tool wear, which is widely used in aerospace, biomedicine, communication electronics and other fields. With the improvement of precision and performance requirements, higher requirements are put forward for the precision, efficiency and controllability of laser processing. Therefore, real-time monitoring and control of laser processing has been widely concerned. Compared with the traditional optical, acoustic, thermal, electric sensing monitoring, optical coherence tomography can directly obtain the depth and morphology of the structure in laser processing via coaxially coupled with the laser beam, which has the advantages of high imaging speed, high measurement resolution and long measurement range, and is widely used in the real-time monitoring of laser processing. The basic setup, imaging principle and index of optical coherence tomography are introduced systematically. And the application of optical coherence tomography technology in real-time monitoring of laser welding, laser additive manufacturing and laser subtractive manufacturing is reviewed. Finally, the disadvantages and development trend of optical coherence tomography in real-time monitoring and control of laser processing are summarized, which provides a solid foundation and development perspective for the study of real-time monitoring and control of laser processing.