一种航空配套微压传感器芯片设计及制备

According to the micro pressure requirement from the aviation field,this paper presents a design and fabrication method for a complex structural pressure sensor chip with grooved membrane combined with beam. The proposed sensor chip can alleviate the contradiction between sensitivity and linearity for a traditional silicon piezoresistive pressure sensor. The stress and deflection of the membrane are calculated by the finite element method(FEM). By the combination of the curve fitting analysis,an optimization method of the sensitive membrane is introduced. Finally,the sensor chip with the proposed structure is fabricated by the MEMS technology. The results show that the sensor has obtained a sensitivity of 30.9 mV/V/psi,a nonlinearity error of 0.25%FS and an integrated accuracy of 0.34%FS in the range of 0~1 psi,realizing the synchronous improvements for the sensitivity and linearity,which meets the requirement in the measurements of aircraft height and wind tunnel.