一种基于锰铜薄膜的小型化切削力传感器

Cutting condition monitoring is a key technology for intelligent cutting of high-grade CNC machine tools, and cutting force is the most direct and effective technical indicator for cutting condition monitoring. Current commercial cutting force dynamometers have the problems of large volume and poor compatibility. In order to make cutting force dynamometers have smaller size and better compatibility, a miniaturized cutting force sensor based on manganese-copper film is designed, which replaces the cutter pad. The cutting force sensor consists of three parts:a substrate, a thin film sensing layer and a cover, which is a typical sandwich structure. The cutting force sensor uses the substrate as an elastic sensitive element, and the manganese-copper thin-film resistor attached to the substrate as a conversion element. Through finite element simulation, a manganese-copper thin film resistor structure is designed according to the stress distribution law on the substrate, which is symmetrically distributed about the long symmetry axis of the substrate. The preparation of thin-film resistors is completed. A cover plate was used to form a sensor prototype. The developed cutting force sensor has a compact structure and good compatibility. The experimental results show that the cutting force sensor has a basic accuracy of 8.09%, a linearity of 2.60%. The cutting force sensor basically has the ability to measure cutting force, which can provide reference experience for subsequent research.